Capacitive–piezoresistive hybrid flexible pressure sensor based on conductive micropillar arrays with high sensitivity over a wide dynamic range

Author:

Shen Zhiran1,Yang Chengduan1,Yao Chuanjie1,Liu Ziqi1,Huang Xinshuo1,Liu Zhengjie1,Mo Jingshan1,Xu Huihua2,He Gen3,Tao Jun1,Xie Xi1ORCID,Hang Tian1,Chen Hui-Jiuan1,Liu Fanmao1ORCID

Affiliation:

1. The First Affiliated Hospital of Sun Yat-sen University, School of Electronics and Information Technology, State Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Province Key Laboratory of Display Material and Technology, Sun Yat-sen University, 510006 Guangzhou, China

2. College of Chemistry and Materials Science, Jinan University, 510632 Guangzhou, China

3. School of Pharmaceutical Sciences, Guangzhou Medical University, 511436 Guangzhou, China

Abstract

A capacitive–piezoresistive hybrid micropillar-array-based pressure sensor (MAPS) was developed, utilizing a facile but highly adjustable fabrication approach and a hybrid sensing strategy. Almost full range of physiological signals can be detected.

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

Basic and Applied Basic Research Foundation of Guangdong Province

Natural Science Foundation of Guangzhou City

Sun Yat-sen University

China Postdoctoral Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrical and Electronic Engineering,Process Chemistry and Technology,Mechanics of Materials,General Materials Science

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