Pulsed-flow growth of polar, semipolar and nonpolar AlGaN
Author:
Affiliation:
1. Institute of Materials and Systems for Sustainability
2. Nagoya University
3. Nagoya 464-8601
4. Japan
5. School of Engineering
6. Nagoya 464-8603
7. Akasaki Research Center
Abstract
The impacts of pulsed-flow growth on aluminium incorporation in polar (0001), semipolar (101̄3) and (112̄2), as well as nonpolar (101̄0) AlGaN layers have been investigated.
Funder
Strategic International Collaborative Research Program
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2020/TC/D0TC01369B
Reference50 articles.
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2. Blue, Green, and Amber InGaN/GaN Light-Emitting Diodes on Semipolar {11-22} GaN Bulk Substrates
3. High-Power (over 100 mW) Green Laser Diodes on Semipolar $\{20\bar{2}1\}$ GaN Substrates Operating at Wavelengths beyond 530 nm
4. Semipolar $({\hbox{20}}\bar{{\hbox{2}}}\bar{{\hbox{1}}})$ InGaN/GaN Light-Emitting Diodes for High-Efficiency Solid-State Lighting
5. GHz bandwidth semipolar (112¯2) InGaN/GaN light-emitting diodes
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