Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Author:

Li Ping12345ORCID,Chen Siyu67345,Dai Houfu12345,Yang Zhengmei12345,Chen Zhiquan12345ORCID,Wang Yasi12345,Chen Yiqin12345,Peng Wenqiang12345,Shan Wubin12345,Duan Huigao12345

Affiliation:

1. National Engineering Research Centre for High Efficiency Grinding

2. College of Mechanical and Vehicle Engineering

3. Hunan University

4. Changsha 410082

5. P. R. China

6. State Key Laboratory of Chemo/Biosensing and Chemometrics

7. College of Chemistry and Chemical Engineering

Abstract

The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing.

Funder

National Natural Science Foundation of China

Natural Science Foundation of Hunan Province

China Postdoctoral Science Foundation

Science and Technology Bureau, Changsha

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

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