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Nanomanufacturing—Perspective and applications

  • Published:2017 Issue:2 Volume:66 Page:683-705
  • ISSN:0007-8506
  • Container-title:CIRP Annals
  • language:en
  • Short-container-title:CIRP Annals

Author:

Fang F.Z.,Zhang X.D.,Gao W.,Guo Y.B.,Byrne G.,Hansen H.N.

Funder

National Natural Science Foundation

National Key Research & Development Program

State Administration of Foreign Experts Affairs

Ministry of Education of China

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference242 articles.

1. 2 Researchers Spell ‘I.B.M.,’ Atom by Atom,1990

2. Precise Mechanical Polishing of Brittle Materials with Free Diamond Abrasives Dispersed in Micro–Nano-bubble Water;Aida;Precision Engineering,2015

3. Chemical Mechanical Polishing of Gallium Nitride with Colloidal Silica;Aida;Journal of The Electrochemical Society,2011

4. Ion-assisted Physical Vapor Deposition for Enhanced Film Properties on Non-flat Surfaces;Alami;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,2005

5. Advanced Techniques for Die and Mold Manufacturing;Altan;CIRP Annals—Manufacturing Technology,1993

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