Tunable thermal conductivity of thin films of polycrystalline AlN by structural inhomogeneity and interfacial oxidation-Reference-Cited by-同舟云学术

Tunable thermal conductivity of thin films of polycrystalline AlN by structural inhomogeneity and interfacial oxidation

Published:2015 Issue:12 Volume:17 Page:8125-8137
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Jaramillo-Fernandez J.¹²³⁴,Ordonez-Miranda J.⁵⁶⁷⁸⁹,Ollier E.¹²³⁴,Volz S.⁵⁶⁷⁸⁹

Affiliation:

1. Laboratoire de Récupération des Micro-énergies LITEN/DTNM/SERE

2. CEA

3. 38000 Grenoble

4. France

5. Laboratoire d’Énergétique Moléculaire et Macroscopique

6. Combustion

7. UPR CNRS 288

8. Ecole Centrale Paris

9. 92295 Châtenay Malabry

Abstract

The effect of local oxidation and grain morphology evolution on the thermal conductivity of polycrystalline aluminum nitrides (AlN) films deposited on single-crystalline silicon substrates is experimentally and theoretically investigated.

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2015/CP/C4CP05838K

Reference63 articles.

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3. Columnar structures in polycrystalline thin films developed by competitive growth

4. Fundamental structure forming phenomena of polycrystalline films and the structure zone models

5. Thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics

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