Influence of different ester side groups in polymers on the vapor phase infiltration with trimethyl aluminum-Reference-Cited by-同舟云学术

Influence of different ester side groups in polymers on the vapor phase infiltration with trimethyl aluminum

Published:2022 Issue:4 Volume:51 Page:1384-1394
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Mai Lukas¹^ORCID,Maniar Dina²^ORCID,Zysk Frederik³,Schöbel Judith²,Kühne Thomas D.³,Loos Katja²^ORCID,Devi Anjana¹^ORCID

Affiliation:

1. Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany

2. Macromolecular Chemistry & New Polymeric Materials, Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG, Groningen, Netherlands

3. Dynamics of Condensed Matter and Center for Sustainable Systems Design, Chair of Theoretical Chemistry, Paderborn University, Warburger Str. 100, 33098 Paderborn, Germany

Abstract

The influence of different polymer side chains on the vapor phase infiltration with TMA is investigated and supported by DFT-calculations.

Funder

Deutsche Forschungsgemeinschaft

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2022/DT/D1DT03753F

Reference58 articles.