P‐10.1: Design and Optimization of Al2O3/Alucone Overlapping Film for Improved Water‐Oxygen Barrier Performance of Flexible Displays

Abstract

Thin‐film encapsulation plays an essential role in the stability of flexible displays. Although Al2O3 film has good water‐oxygen barrier properties, its bending performance needs to be enhanced. This paper inserts Alucone into Al2O3 film to generate Al2O3/Alucone overlapping film with good barrier and bending performance to improve the encapsulated devices. The finite element analyzing approach and the calcium dot arrays test are employed to investigate the influence of structural ratio and overlapping density on the water‐oxygen barrier and mechanical properties of the Al2O3/Alucone overlapping film. The results show that the proportion of Alucone sublayers in the Al2O3/Alucone overlapping film (with a total thickness of 60 nm) is directly proportional to the overlapping structure's ability to disperse stresses and inversely proportional to the overlapping structure's water‐oxygen barrier property. When the Al2O3/Alucone overlapping structure ratio is 1:1, the Al2O3/Alucone overlapping film can balance the bending and barrier properties. The bending property of Al2O3/Alucone overlapping film (Al2O3/Alucone ratio is 1:1, total thickness is 60 nm) diminishes with increasing overlapping density, and its water‐oxygen barrier property increases and then drops. Combining the results of the simulation and calcium dot arrays test, it is apparent that when the Al2O3/Alucone ratio is 1:1 and the overlapping density is 5, the Al2O3/Alucone overlapping film has good bending and barrier performance. This is expected to promote the development of commercial flexible display technology.