Transferrable single crystalline 4H-SiC nanomembranes-Reference-Cited by-同舟云学术

Transferrable single crystalline 4H-SiC nanomembranes

Published:2017 Issue:2 Volume:5 Page:264-268
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Kim Munho¹²³⁴,Seo Jung-Hun¹²³⁴^ORCID,Zhao Deyin⁵⁶⁷⁴,Liu Shih-Chia⁵⁶⁷⁴,Kim Kwangeun¹²³⁴,Lim Kangmook⁸⁹¹⁰⁴,Zhou Weidong⁵⁶⁷⁴,Waks Edo⁸⁹¹⁰⁴,Ma Zhenqiang¹²³⁴

Affiliation:

1. Department of Electrical and Computer Engineering

2. University of Wisconsin-Madison

3. Madison

4. USA

5. Department of Electrical Engineering

6. University of Texas at Arlington

7. Arlington

8. Department of Electrical and Computer Engineering and Joint Quantum Institute

9. University of Maryland at College Park

10. College Park

Abstract

In this work, we demonstrate a transferrable single crystalline 4H-SiC nanomembrane (SiC NM) released from a SiC-on-insulator (SiCOI) wafer.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/TC/C6TC04480H

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