Ultraviolet antireflective porous nanoscale periodic hole array of 4H-SiC by Photon-Enhanced Metal-assisted chemical etching
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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1. Numerical Simulation and Experimental Investigation of ps Pulsed Laser Modification inside 4H-SiC Material;Photonics;2024-02-19
2. Metal-assisted chemical etching beyond Si: applications to III–V compounds and wide-bandgap semiconductors;Nanoscale;2024
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4. Silicon carbide nano-via arrays fabricated by double-sided metal-assisted photochemical etching;Materials Today Communications;2023-06
5. Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing;Applied Physics Reviews;2023-02-13
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