The low temperature atomic layer deposition of ruthenium and the effect of oxygen exposure
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2012/JM/C2JM35332F
Reference40 articles.
1. Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium
2. Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O[sub 2]
3. Initial surface reactions of atomic layer deposition
4. Ruthenium Thin Films Grown by Atomic Layer Deposition
5. Mono-Energetic Neutron Source by 7Li(p,n)7Be Reaction
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