ALD/MLD processes for Mn and Co based hybrid thin films
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry
2. Department of Chemistry
3. Aalto University
4. FI-00076 Aalto
5. Espoo
Abstract
New types of transition metal–organic hybrid thin films are fabricated with the emerging atomic/molecular layer deposition (ALD/MLD) technique through sequential gas-surface reactions from Mn(thd)3, Co(thd)2, Co(acac)3 and terephthalic acid (1,4-benzenedicarboxylic acid) precursors.
Funder
European Research Council
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/DT/C6DT00851H
Reference38 articles.
1. Atomic Layer Deposition: An Overview
2. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
3. Atomic layer deposition of perovskite oxides and their epitaxial integration with Si, Ge, and other semiconductors
4. Organic and inorganic–organic thin film structures by molecular layer deposition: A review
5. Polymer films formed with monolayer growth steps by molecular layer deposition
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films;Chemistry of Materials;2024-06-25
2. Conformal Zn‐Benzene Dithiol Thin Films for Temperature‐Sensitive Electronics Grown via Industry‐Feasible Atomic/Molecular Layer Deposition Technique;Small;2024-06-09
3. Vapor-phase methods for synthesizing metal-organic framework thin films;The Innovation Materials;2024
4. Review of molecular layer deposition process and application to area selective deposition via graphitization;Japanese Journal of Applied Physics;2023-04-21
5. Atomic/Molecular Layer Deposition for Designer's Functional Metal–Organic Materials;Advanced Materials Interfaces;2022-04-20
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3