Angle resolved photoelectron spectroscopy as applied to X-ray mirrors: an in depth study of Mo/Si multilayer systems-Reference-Cited by-同舟云学术

Angle resolved photoelectron spectroscopy as applied to X-ray mirrors: an in depth study of Mo/Si multilayer systems

Published:2019 Issue:45 Volume:21 Page:25002-25010
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Sakhonenkov Sergei S.¹²³⁴^ORCID,Filatova Elena O.¹²³⁴^ORCID,Gaisin Aidar U.¹²³⁴,Kasatikov Sergey A.¹²³⁴,Konashuk Aleksei S.¹²³⁴,Pleshkov Roman S.⁵⁶⁷⁴,Chkhalo Nikolay I.⁵⁶⁷⁴

Affiliation:

1. Institute of Physics

2. St-Petersburg State University

3. St. Petersburg

4. Russia

5. Institute for Physics of Microstructure

6. Russian Academy of Sciences

7. Nizhny Novgorod

Abstract

The chemical composition and extension of interfaces of a multilayer mirror were investigated by means of ARXPS relying on the concept of the EAL.

Funder

Russian Foundation for Basic Research

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2019/CP/C9CP04582A

Reference45 articles.

1. Application of a single-reflection collimating multilayer optic for X-ray diffraction experiments employing parallel-beam geometry

2. Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy

3. Multilayer mirror technology for soft-x-ray projection lithography

4. Multilayer Mirrors For X-Ray Lithography

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