Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep22294.pdf
Reference63 articles.
1. Imboden, M. & Bishop, D. Top-down nanomanufacturing. Phys. Today 67, 45–50 (2014). doi: 10.1063/PT.3.2621.
2. Okino, T., Kuba, Y., Shibata M. & Ohyi, H. 130 kV high-resolution electron beam lithography system for sub-10-nm nanofabrication. Jap. J. Appl. Phys. 52, 06GB01 (2013).
3. Li, W.-D., Wu, W. & Williams, R. S. Combined helium ion beam and nanoimprint lithography attains 4nm half-pitch dense patterns. J. Vac. Sci. Technol. B 30, 06F304 (2012).
4. Gan, Z., Cao Y., Evans, R. A. & Gu, M. Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Nature Commun. 4, 2061 (2013).
5. Wu, B. & Kumar, A. Extreme ultraviolet lithography and three dimensional integrated circuit –A review. Appl. Phys. Rev. 1, 011104 (2014).
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