A Tunable Laser Interference Lithography for Extreme Period Range Gratings
Author:
Affiliation:
1. University of Zilina,Faculty of Electrical Engineering and Information Technology,Dept. of Physics,Zilina,01026
Funder
Ministry of Education, Science, Research and Sport of the Slovak Republic projects
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10556796/10556828/10556998.pdf?arnumber=10556998
Reference6 articles.
1. Fabrication of photonic crystals for the visible spectrum by holographic lithography
2. Bio-inspired hierarchical patterning of silicon by laser interference lithography
3. Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors
4. Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique
5. Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats
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