Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-017-14122-4.pdf
Reference31 articles.
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5. Lewis, J. S. & Weaver, M. S. Thin-film permeation-barrier technology for flexible organic light-emitting devices. IEEE J. Sel. Top. Quantum Electron. 10, 45–57 (2004).
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