Author:
Yang Joel K. W.,Jung Yeon Sik,Chang Jae-Byum,Mickiewicz R. A.,Alexander-Katz A.,Ross C. A.,Berggren Karl K.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science,Biomedical Engineering,Atomic and Molecular Physics, and Optics,Bioengineering
Reference30 articles.
1. Bang, J., Jeong, U., Ryu, D. Y., Russell, T. P. & Hawker, C. J. Block copolymer nanolithography: translation of molecular level control to nanoscale patterns. Adv. Mater. 21, 1–24 (2009).
2. Stoykovich, M. P. et al. Directed assembly of block copolymer blends into nonregular device-oriented structures. Science 308, 1442–1446 (2005).
3. Bita, I. et al. Graphoepitaxy of self-assembled block copolymers on 2D periodic patterned templates. Science 321, 939–943 (2008).
4. Cheng, J. Y., Rettner, C. T., Sanders, D. P., Kim, H. C. & Hinsberg, W. D. Dense self-assembly on sparse chemical patterns: rectifying and multiplying lithographic patterns using block copolymers. Adv. Mater. 20, 3155–3158 (2008).
5. Ruiz, R. et al. Density multiplication and improved lithography by directed block copolymer assembly. Science 321, 936–939 (2008).
Cited by
250 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献