Abstract
AbstractInspired by the concept of bionics, a tactile and airflow motion sensor based on flexible double-layer magnetic cilia is developed, showing extremely high sensitivity in both force and airflow detection. The upper layer of the magnetic cilia is a flexible material mixed with magnetic particles, while the lower layer is a pure flexible material. This double-layer structure significantly improves magnetism while maintaining cilia flexibility. In addition, a metal tube pressing (MTP) method is proposed to overcome the difficulties in preparing large aspect ratio (over 30:1) cilia, offering simplicity and avoiding the use of large-scale MEMS instruments. The developed sensor has a detection range between 0 and 60 µN with a resolution of 2.1 µN for micro forces. It also shows great detection ability for airflow velocity with a sensitivity of 1.43 µT/(m/s). Experiments show that the sensor could be applied in surface roughness characterization and sleep apnea monitoring.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics
Cited by
8 articles.
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