Focused-Ion-Beam Induced Rayleigh-Plateau Instability for Diversiform Suspended Nanostructure Fabrication
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep08236.pdf
Reference32 articles.
1. Stewart, D. K., Doyle, A. F. & Casey, Jr, J. D. Focused ion beam deposition of new materials: dielectric films for device modification and mask repair and tantalum films for x-ray mask repair. Proc SPIE 2437, 276 (1995).
2. Reyntjens, S. & Puers, R. A review of focused ion beam applications in microsystem technology. J Micromech Microeng 11, 287–300 (2001).
3. Glanville, J. Focused ion-beam technology for integrated-circuit modification. Solid State Technol 32, 270 (1989).
4. Ward, B. W. et al. Microcircuit modification using focused ion beams. Proc SPIE 923, 92 (1988).
5. Stewart, D. K., Stern, L. A., Foss, G., Hughes, G. & Govil, P. Focused ion beam induced tungsten deposition for repair of clear defects on x-ray masks. Proc SPIE 1263, 21 (1990).
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Gas dynamic virtual nozzle induced flow of viscoelastic fluids;Physics of Fluids;2024-08-01
2. Efficient Broadband Light Absorption in a Bioinspired Silicon Photonic Structure;The Journal of Physical Chemistry C;2024-05-14
3. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications;Nanoscale;2021
4. A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect;Micromachines;2020-01-16
5. Precise Fabrication of Gap-Tunable Nanoantennas for Plasmon-Enhanced Spectroscopy and Biosensing;2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS);2020-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3