Author:
Ohta H.,Miura H.,Kitano M.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference19 articles.
1. Stress analysis of transistor structures considering the internal stress of thin films;Miura;JSME Int. Journal,1994
2. Stress in silicon at Si3N4/SiO2 film edges and viscoelastic behavior of SiO2 films;Isomae;J. Appl. Phys.,1985
3. Evaluation of dislocation generation in U-groove isolation;Tamaki;Solid-State Sci. Technol.,1988
4. Ikeda S. Hagiwara Y. Miura H. Ohta H. 1996 Proceedings of IEDM ′96 77 81
5. Miura H. Saito N. Ohta H. et al. 1993 Proceedings of the 5th International Conference on Simulation of Semiconductor Devices and Processes 177 179
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