Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process
Author:
Funder
National Natural Science Foundation of China
Publisher
MDPI AG
Subject
General Materials Science
Link
http://www.mdpi.com/1996-1944/10/12/1424/pdf
Reference41 articles.
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4. Theoretical modeling of the critical conditions for ductile-regime milling of single crystalline silicon
5. An experimental study of edge radius effect on cutting single crystal silicon
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