Author:
MIZUO Shoichi,HIGUCHI Hisayuki
Publisher
The Electrochemical Society of Japan
Cited by
14 articles.
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1. Dopants;Computational Microelectronics;2004
2. Intrinsic Point Defects;Computational Microelectronics;2004
3. Interactions of silicon point defects with SiO2films;Journal of Applied Physics;1992-01-15
4. Dopant diffusion during high‐temperature oxidation of silicon;Applied Physics Letters;1991-10-14
5. Point defects and dopant diffusion in silicon;Reviews of Modern Physics;1989-04-01