Copper Iminopyrrolidinates: A Study of Thermal and Surface Chemistry
Author:
Affiliation:
1. Department of Chemistry, Carleton University, 1125 Colonel By Drive, Ottawa, Canada
2. Department of Chemistry & Biochemistry, University of Delaware, Newark, United States
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ic3021035
Reference25 articles.
1. 2011, Edition of the International Technology Roadmap for Semiconductors;http://www.itrs.net/Links/2011ITRS/Home2011.htm.
2. Atomic Layer Deposition of Ultrathin Copper Metal Films from a Liquid Copper(I) Amidinate Precursor
3. Synthesis and Characterization of Copper(I) Amidinates as Precursors for Atomic Layer Deposition (ALD) of Copper Metal
4. CVD of Pure Copper Films from Amidinate Precursor
5. Uptake of Copper Acetamidinate ALD Precursors on Nickel Surfaces
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