Three-Component Negative-Type Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator

Author:

Ueda Mitsuru1,Takahashi Daisuke1,Nakayama Tomonari1,Haba Osamu1

Affiliation:

1. Department of Human Sensing and Functional Sensor Engineering, Graduate School of Engineering, Yamagata University, Yonezawa, Yamagata 992-8510, Japan

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

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