Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia

Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia–Zirconia Alloys

Published:2022-11-17 Issue:47 Volume:14 Page:53057-53064
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Yu Zhouchangwan¹^ORCID,Saini Balreen²^ORCID,Liu Yunzhi²^ORCID,Huang Fei¹^ORCID,Mehta Apurva³^ORCID,Baniecki John D.³,Wong H.-S. Philip¹,Tsai Wilman²^ORCID,McIntyre Paul C.²³^ORCID

Affiliation:

1. Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States

2. Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, United States

3. SLAC National Accelerator Laboratory, Menlo Park, California 94025, United States

Funder

Stanford University

Semiconductor Research Corporation

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.2c15047

Reference43 articles.

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5. The origin of ferroelectricity in Hf1−xZrxO2: A computational investigation and a surface energy model

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