High-Throughput Direct Writing of Metallic Micro- and Nano-Structures by Focused Ga<sup>+</sup> Beam Irradiation of Palladium Acetate Films-Reference-Cited by-同舟云学术

High-Throughput Direct Writing of Metallic Micro- and Nano-Structures by Focused Ga⁺ Beam Irradiation of Palladium Acetate Films

Published:2022-06-07 Issue:24 Volume:14 Page:28211-28220
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Salvador-Porroche Alba¹^ORCID,Herrer Lucía¹^ORCID,Sangiao Soraya¹²^ORCID,Philipp Patrick³^ORCID,Cea Pilar¹²^ORCID,María De Teresa José¹²^ORCID

Affiliation:

1. Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, Zaragoza 50009, Spain

2. Laboratorio de Microscopías Avanzadas (LMA), Universidad de Zaragoza, Zaragoza 50018, Spain

3. Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, Belvaux 4422, Luxembourg

Funder

Ministerio de Econom??a y Competitividad

Gobierno de Arag??n

Fonds National de la Recherche Luxembourg

Ministerio de Ciencia e Innovaci??n

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.2c05218

Reference54 articles.

1. Size-Dependent Resistivity in Nanoscale Interconnects

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