1. Institute of Semiconductor Manufacturing Research, Shenzhen University, Shenzhen 518060, China
2. Shenzhen Silver Basis Technology Company Limited, Shenzhen 518108, China
3. Institute of Microelectronics, Shenzhen University, Shenzhen 518060, China
4. Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China