High Refractive Index Nanocomposite Fluids for Immersion Lithography
Author:
Affiliation:
1. DSM Research, ACES, P.O. Box 18, 6160 MD Geleen, The Netherlands, and DSM Licensing, P.O. Box 53, 6160 AB Geleen, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la8026896
Reference60 articles.
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