All-Polymer Integrated Optical Resonators by Roll-to-Roll Nanoimprint Lithography
Author:
Affiliation:
1. John A. Paulson School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, United States
2. Nano Terra, Inc., 737 Concord Avenue, Cambridge, Massachusetts 02138, United States
Funder
Defense Advanced Research Projects Agency
Publisher
American Chemical Society (ACS)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Biotechnology,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acsphotonics.8b00022
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