1. CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China
2. CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China
3. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microystem and Information Technology, Chinese Academy of Science, Shanghai 20050, China
4. Center for Micro and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, Anhui 230026, China
5. Hefei National Laboratory, University of Science and Technology of China, Hefei 230088, China