Three-Dimensional Silicon Electronic Systems Fabricated by Compressive Buckling Process

Author:

Kim Bong Hoon12ORCID,Lee Jungyup2,Won Sang Min2,Xie Zhaoqian34,Chang Jan-Kai2,Yu Yongjoon2,Cho Youn Kyoung2,Jang Hokyung2,Jeong Ji Yoon2,Lee Yechan2,Ryu Arin2,Kim Do Hoon2,Lee Kun Hyuck1,Lee Jong Yoon2,Liu Fei5,Wang Xueju1,Huo Qingze3,Min Seunghwan2,Wu Di34,Ji Bowen3,Banks Anthony12,Kim Jeonghyun6,Oh Nuri7ORCID,Jin Hyeong Min8,Han Seungyong9,Kang Daeshik9,Lee Chi Hwan10,Song Young Min11,Zhang Yihui5,Huang Yonggang3,Jang Kyung-In12,Rogers John A.1ORCID

Affiliation:

1. Departments of Materials Science and Engineering, Biomedical Engineering, Chemistry, Neurological Surgery, Mechanical Engineering, Electrical Engineering and Computer Science, Simpson Querrey Institute & Feinberg Medical School, Center for Bio-Integrated Electronics, Northwestern University, Evanston, Illinois 60208, United States

2. Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States

3. Department of Civil and Environmental Engineering, Mechanical Engineering, and Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States

4. AML, Department of Engineering Mechanics, Center for Mechanics and Materials, Tsinghua University, Beijing 100084, China

5. Center for Mechanics and Materials, Center for Flexible Electronics Technology, AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China

6. Department of Electronics Convergence Engineering, Kwangwoon University, Seoul 01897, Republic of Korea

7. Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea

8. Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States

9. Department of Mechanical Engineering, Ajou University, Suwon, 443-749, Republic of Korea

10. Weldon School of Biomedical Engineering, School of Mechanical Engineering, The Center for Implantable Devices, and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States

11. School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Republic of Korea

12. Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Republic of Korea

Funder

Division of Industrial Innovation and Partnerships

National Research Foundation of Korea

National Institute of Biomedical Imaging and Bioengineering

Division of Civil, Mechanical and Manufacturing Innovation

National Natural Science Foundation of China

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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