1. NaMLab gGmbH, Noethnitzer Straße
64, D-01187 Dresden, Germany
2. Center
for Advancing Electronics Dresden (CfAED), TU Dresden, D-01062 Dresden, Germany
3. Institute
of Semiconductor and Microsystems (IHM), TU Dresden, D-01062 Dresden, Germany
4. Dresden
Center for Nanoanalysis (DCN), TU Dresden, D-01062 Dresden, Germany
5. Fraunhofer Institute for Ceramic Technologies and Systems (IKTS), D-01277 Dresden, Germany