Bias-tunable temperature coefficient of resistance in Ge transistors

Abstract

Ge-based bolometers are widely used for near-infrared detection for a broad range of applications such as thermography or chemical analysis. Notably, for the thermometers used in bolometers, integration, scaling, and sensitivity as well as functionality are of utmost importance. In this regard, Ge exhibits a favorable temperature sensitivity due to the relatively low bandgap and a high intrinsic charge carrier concentration. In this work, we demonstrate a nanoscale thermometer for bolometric applications on the base of Ge-on-insulator nanosheets with monolithic Al source/drain contacts envisioned for future wafer-scale integration. Importantly, electrostatic gating of the nanosheets allows the operation as a Schottky barrier field-effect transistor, providing tunability of the energy landscape and the involved charge carrier injection in interaction with the metal-semiconductor junctions. In this approach, the top-gate electrode and drain contact are connected, thus resembling a two-terminal device with bias-tunable temperature coefficient of resistance (TCR) values between 0%/K and −3.8%/K in the temperature range of T = 125–150 K. Moreover, in this configuration, even at room temperature, a maximum TCR value of −1.6%/K is achieved. The bias-tunable TCR exhibited in these devices may enable advanced concepts for room temperature bolometric applications and allow co-integration with nanoelectronics.