Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal–Organic Chemical Vapor Deposition

Author:

Kang Minsoo1ORCID,Chai Hyun-Jun1,Jeong Han Beom1,Park Cheolmin2,Jung In-young34,Park Eunpyo5,Çiçek Mert Miraç67,Lee Injun8,Bae Byeong-Soo8ORCID,Durgun Engin7ORCID,Kwak Joon Young5ORCID,Song Seungwoo4ORCID,Choi Sung-Yool2ORCID,Jeong Hu Young9ORCID,Kang Kibum110ORCID

Affiliation:

1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST) 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

2. School of Electrical Engineering, Graphene/2D Materials Research Center, Center for Advanced Materials Discovery towards 3D Display, Korea Advanced Institute of Science and Technology (KAIST) 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

3. Department of Physics, Hanyang University, Seoul 04763, Republic of Korea

4. Operando Methodology and Measurement Team, Korea Research Institute of Standards & Science (KRISS), Daejeon 34113, Republic of Korea

5. Center for Neuromorphic Engineering, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea

6. Department of Engineering Physics, Faculty of Engineering, Ankara University, Ankara 06100, Turkey

7. UNAM—National Nanotechnology Research Center and Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey

8. Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST) 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

9. UNIST Central Research Facilities (UCRF) and Department of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea

10. Advanced Nanosensor Research Center, KI Nanocentury, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

Funder

National Research Foundation of Korea

POSCO TJ Park Foundation

Korea Institute of Science and Technology

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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