All-Solution-Processed Electronics with Sub-Microscale Resolution and Nanoscale Fidelity Fabricated Via a Humidity-Controlled, Surface Energy-Directed Assembly Process-Reference-Cited by-同舟云学术

All-Solution-Processed Electronics with Sub-Microscale Resolution and Nanoscale Fidelity Fabricated Via a Humidity-Controlled, Surface Energy-Directed Assembly Process

Published:2024-07-13 Issue:31 Volume:18 Page:20493-20503
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Zhang Jingwei¹²,Wang Guangji¹²,Chai Zhimin¹²^ORCID,Li Zetong¹²,Yuan Siqing¹²,Wang Yihuan³,Ding Yi³,Sun Taohan³,Wang Tongqing¹²,Zhao Dewen¹²,Busnaina Ahmed A.⁴^ORCID,Ren Tian-Ling⁵^ORCID,Lu Xinchun¹²^ORCID

Affiliation:

1. Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

2. State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing 100084, China

3. Weiyang College, Tsinghua University, Beijing 100084, China

4. NSF Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing (CHN), Northeastern University, Boston, Massachusetts 02115, United States

5. School of Integrated Circuits and Beijing National Research on Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China

Funder

Tsinghua University

National Natural Science Foundation of China

State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsnano.4c04936

Reference51 articles.

1. Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor

2. Highly Scalable and Robust Mesa‐Island‐Structure Metal‐Oxide Thin‐Film Transistors and Integrated Circuits Enabled by Stress‐Diffusive Manipulation

3. Additively Manufactured Zinc Oxide Thin-Film Transistors Using Directed Assembly

4. High-mobility hydrogenated polycrystalline In2O3 (In2O3:H) thin-film transistors

5. Scaled indium oxide transistors fabricated using atomic layer deposition