Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching-Reference-Cited by-同舟云学术

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

Published:2021-06-25 Issue:7 Volume:15 Page:12276-12285
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Song Seung Keun¹^ORCID,Kim Jung-Sik¹^ORCID,Margavio Hannah R. M.¹^ORCID,Parsons Gregory N.¹^ORCID

Affiliation:

1. Department of Chemical and Biomolecular Engineering, North Carolina State University, Raleigh, North Carolina 27695, United States

Funder

Semiconductor Research Corporation

National Science Foundation

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsnano.1c04086

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