1. Micro-
and Nano-technology Research Center, State Key Laboratory for Manufacturing
Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China
2. Shaanxi Province Key Laboratory of Thin
Film Technology and Optical Test, Xi’an Technological University, Xi’an, Shaanxi 710032, China
3. Department of Mechanical Engineering, College
of Engineering and Computer Science, University of Michigan—Dearborn, Dearborn, Michigan 48128, United States