Competition of Silene/Silylene Chemistry with Free Radical Chain Reactions Using 1-Methylsilacyclobutane in the Hot-Wire Chemical Vapor Deposition Process
Author:
Affiliation:
1. Department of Chemistry, University of Calgary, Calgary, Alberta T2N 1N4, Canada
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp3055558
Reference49 articles.
1. Hetero-π-systems from 2+2 cycloreversions. Part 1. Gusel'nikov–Flowers route to silenes and origination of the chemistry of doubly bonded silicon
2. Kinetics of silicon carbide CVD: surface decomposition of silacyclobutane and methylsilane
3. Chemical vapor deposition of silicon carbide from 1,3-disilacyclobutane
4. Growth of crystalline 3C‐SiC on Si at reduced temperatures by chemical vapor deposition from silacyclobutane
5. Effect of carbonization on the growth of 3C‐SiC on Si (111) by silacyclobutane
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