Growth of crystalline 3C‐SiC on Si at reduced temperatures by chemical vapor deposition from silacyclobutane
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110140
Reference15 articles.
1. Epitaxial Growth and Characterization of β ‐ SiC Thin Films
2. Epitaxial growth and electric characteristics of cubic SiC on silicon
3. Growth and Characterization of Cubic SiC Single‐Crystal Films on Si
4. Epitaxial growth of β-SiC single crystals by successive two-step CVD
5. Heteroepitaxial β ‐ SiC on Si
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