Funder
National Science Foundation
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference36 articles.
1. P.M. Sarro, Silicon carbide as a new MEMS technology. Sens. Actuators, A 82(1–3), 210–218 (2000)
2. J.H. Zhao, G. Pensl, T. Kimoto, H. Matsunami, H. Kosugi, J.A. Cooper, M. Weiner, Special issue on silicon carbide devices and technology. IEEE Trans. Electron. Devices 55(8), 1795–1797 (2008)
3. M. Mehregany, C.A. Zorman, N. Rajan, C.H. Wu, Silicon carbide MEMS for harsh environments. Proc. IEEE 86(8), 1594–1609 (1998)
4. J. Arbiol, Q. Xiong (eds.), Semiconductor Nanowires: Materials, Synthesis, Characterization and Applications (Elsevier, Amsterdam, 2015)
5. X. Jiang, C.P. Klages, Recent developments in heteroepitaxial nucleation and growth of diamond on silicon. Phys. Status Solidi A 154(1), 175–183 (1996)