Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, and Department of Chemical Engineering, University of Colorado, Boulder, Colorado 80309-0215
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm020607%2B
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4. Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films
5. Properties of atomic layer deposited (Ta1−xNbx)2O5 solid solution films and Ta2O5–Nb2O5 nanolaminates
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