Inhibition of Silica Nanoparticle Adhesion to Poly(vinyl alcohol) Surfaces by Ammonia-Mediated Hydration: Implications for Effective Post-Chemical–Mechanical Planarization Cleaning-Reference-Cited by-同舟云学术

Inhibition of Silica Nanoparticle Adhesion to Poly(vinyl alcohol) Surfaces by Ammonia-Mediated Hydration: Implications for Effective Post-Chemical–Mechanical Planarization Cleaning

Published:2020-12-16 Issue:1 Volume:4 Page:71-83
ISSN:2574-0970
Container-title:ACS Applied Nano Materials
language:en
Short-container-title:ACS Appl. Nano Mater.

Author:

Ikarashi Takahiko¹^ORCID,Yoshino Takumi¹,Nakajima Naoki¹,Miyata Kazuki¹²³^ORCID,Miyazawa Keisuke¹²³^ORCID,Morais Jaques Ygor⁴^ORCID,Foster Adam S.²⁴^ORCID,Uno Megumi⁵^ORCID,Takatoh Chikako⁵^ORCID,Fukuma Takeshi¹²³^ORCID

Affiliation:

1. Division of Electrical Engineering and Computer Science, Kanazawa University, Kakuma-machi, 920-1192 Kanazawa, Japan

2. Nano Life Science Institute (WPI-NanoLSI), Kanazawa University, Kakuma-machi, 920-1192 Kanazawa, Japan

3. Faculty of Frontier Engineering, Kanazawa University, Kakuma-machi, 920-1192 Kanazawa, Japan

4. Department of Applied Physics, Aalto University, FI-00076 Helsinki, Finland

5. EBARA Corporation, 144-8510 Tokyo, Japan

Funder

Ministry of Education, Culture, Sports, Science and Technology

Japan Society for the Promotion of Science

Japan Science and Technology Agency

Academy of Finland

Publisher