1. Yongsik Moon, in: Inter. Conf. CMP/Planar. Technol. (ICPT), Oct. 30, 2013.
2. CMP Process Control for Advanced CMOS Device Integration
3. Chemical Mechanical Planarization: Slurry Chemistry, Materials, and Mechanisms
4. Jiyoung Kim, Angustin J. Hong, Masaaki Ogawa, Siguang Ma, Emil B. Song, You-Sheng Lin, U-In Chung, Kang L. Wang, in: Symp. VLSI Technol., Jun. 17–19, 2008, pp. 122–123.
5. Hong Jin Kim, Robert Solan, Liqiao Qin, Si-Gyung Ahn, Bohra Girish, Dinesh Koli, Venugopal Govindarajulu, Yongsik Moon, in: Center For Advanced Materials Processing (CAMP) 19th international CMP symposium, Aug. 10, 2014.