2-Methyl-1-hexen-3-yne Lewis Base Stabilized β-Diketonate Copper(I) Complexes: X-ray Structures, Theoretical Study, and Low-Temperature Chemical Vapor Deposition of Copper Metal-Reference-Cited by-同舟云学术

2-Methyl-1-hexen-3-yne Lewis Base Stabilized β-Diketonate Copper(I) Complexes: X-ray Structures, Theoretical Study, and Low-Temperature Chemical Vapor Deposition of Copper Metal

Published:2001-09-20 Issue:11 Volume:13 Page:3993-4004
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Chen T.-Y.¹,Vaissermann J.¹,Ruiz E.¹,Sénateur J. P.¹,Doppelt P.¹

Affiliation:

1. Laboratoire de Chimie Inorganique et Matériaux Moléculaires (CNRS 7071), ESPCI, 10 rue Vauquelin, 75231 Paris Cedex 05, France; Université P. et M. Curie, 4 Place Jussieu, 75231 Paris Cedex 05, France; Departament de Química Inorgànica and Centre de Recerca en Química Teórica (CeRQT), Universitat de Barcelona, Diagonal 647, 08028 Barcelona, Spain; Laboratoire de Matériaux et Génie Physique, INPG (CNRS 5628), rue de la Houille Blanche, 38402 Saint-Martin-d’Hères, France

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm0012318

Reference59 articles.

1. The Chemistry of Metal CVD

2. Selective electroless copper for VLSI interconnection

3. On-chip wiring for VLSI: Status and directions

4. Chemical Vapor Deposition of Copper for IC Metallization: Precursor Chemistry and Molecular Structure

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