Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range-Reference-Cited by-同舟云学术

Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range

Published:2010-03-19 Issue:14 Volume:114 Page:6484-6490
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Le Guen K.¹,Hu M.-H.¹,André J.-M.¹,Jonnard P.¹,Zhou S. K.²,Li H. Ch.²,Zhu J. T.²,Wang Z. S.²,Meny C.³

Affiliation:

1. Laboratoire Chimie Physique - Matière Rayonnement, University Pierre et Marie Curie Paris 06, CNRS UMR 7614, 11 rue Pierre et Marie Curie, F-75231 Paris cedex 05, France

2. Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, People’s Republic of China

3. Institut de Physique et Chimie des Matériaux de Strasbourg, CNRS UMR 7504, 23 rue du Loess, BP 43, F-67034 Strasbourg cedex 2, France

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp911119z

Reference40 articles.

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2. Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors

3. Non-destructive X-ray study of the interphases in Mo/Si and Mo/B4C/Si/B4C multilayers

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