On the optical constants of cobalt in the M-absorption edge region-Reference-Cited by-同舟云学术

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On the optical constants of cobalt in the M-absorption edge region

Published:2023-02 Issue: Volume:273 Page:170455
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Saadeh Qais,Naujok Philipp,Thakare Devesh^ORCID,Wu Meiyi^ORCID,Philipsen Vicky^ORCID,Scholze Frank^ORCID,Buchholz Christian,Salami Zanyar,Abdulhadi Yasser,García Danilo Ocaña,Mentzel Heiko,Babuschkin Anja,Laubis Christian,Soltwisch Victor

Funder

Electronic Components and Systems for European Leadership

Horizon 2020 Framework Programme

European Metrology Programme for Innovation and Research

European Commission

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference101 articles.

1. High-NA EUV lithography: pushing the limits;Zahlten;Proc. SPIE 11177 35th Eur. Mask. Lithogr. Conf.,2019

2. High-NA EUV lithography exposure tool: advantages and program progress;Van Schoot;Proc. SPIE 11517 Extrem. Ultrav. Lithogr.,2021

3. Extreme ultraviolet high-harmonic spectroscopy of solids;Luu;Nature,2015

4. Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy;Bogachev;Appl. Opt.,2016

5. Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup;Bahrenberg;Opt. Express,2020

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