Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup-Reference-Cited by-同舟云学术

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Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup

Published:2020-06-25 Issue:14 Volume:28 Page:20489
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Bahrenberg Lukas,Danylyuk Serhiy,Glabisch Sven,Ghafoori Moein,Schröder Sophia,Brose Sascha,Stollenwerk Jochen,Loosen Peter

Funder

Deutsche Forschungsgemeinschaft

Electronic Components and Systems for European Leadership

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference29 articles.

1. Perspective: Optical measurement of feature dimensions and shapes by scatterometry

2. Scatterometry—fast and robust measurements of nano-textured surfaces

3. Gaps analysis for CD metrology beyond the 22nm node

4. X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92

5. EUV scatterometer with a high-harmonic-generation EUV source

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2. Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging;Review of Scientific Instruments;2023-12-01

3. On the optical constants of cobalt in the M-absorption edge region;Optik;2023-02

4. A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range;Review of Scientific Instruments;2023-01-01

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