Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography-Reference-Cited by-同舟云学术

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Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography

Published:2024-05 Issue: Volume:211 Page:113894
ISSN:1044-5803
Container-title:Materials Characterization
language:en
Short-container-title:Materials Characterization

Author:

Abel Johann J.,Apell Jonathan,Wiesner Felix,Reinhard Julius,Wünsche Martin,Felde Nadja,Schmidl Gabriele,Plentz Jonathan,Paulus Gerhard G.,Lippmann Stephanie,Fuchs Silvio

Funder

Bundesministerium fur Bildung und Forschung Dienststelle Berlin

Thüringer Aufbaubank

Fraunhofer-Gesellschaft

Visionary Integration Professionals

German Research Foundation

Max-Planck-Gesellschaft

Bundesministerium für Bildung und Forschung

European Social Fund Plus

Publisher

Elsevier BV

Reference37 articles.

1. Transmission Electron Microscopy: A Textbook for Materials Science;Williams,2009

2. TEM sample preparation and FIB-induced damage;Mayer;MRS Bull.,2007

3. Heating of TEM specimens during ion milling;Viguier;Ultramicroscopy,2001

4. Radiation damage to organic and inorganic specimens in the TEM;Egerton;Micron,2019

5. Electron beam effects on oxide thin films—structure and electrical property correlations;Neelisetty;Microsc. Microanal.,2019

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical Coherence Tomography of Van Der Waals Heterostructures Using Extreme Ultraviolet Light;Advanced Materials Interfaces;2024-09-02

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