Polymer-Assisted Deposition of Gallium Oxide for Thin-Film Transistor Applications-Reference-Cited by-同舟云学术

Polymer-Assisted Deposition of Gallium Oxide for Thin-Film Transistor Applications

Published:2019-07-23 Issue:32 Volume:11 Page:29078-29085
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Chen Lin¹,Xu Wangying¹^ORCID,Liu Wenjun¹,Han Shun¹,Cao Peijiang¹^ORCID,Fang Ming¹,Zhu Deliang¹,Lu Youming¹

Affiliation:

1. College of Materials Science and Engineering, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen University, Shenzhen 518060, China

Funder

Natural Science Foundation of Guangdong Province

National Natural Science Foundation of China

Science and Technology Foundation of Shenzhen

Natural Science Foundation of Shenzhen University

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.9b10888

Reference66 articles.

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2. Chemical bonding, optical constants, and electrical resistivity of sputter-deposited gallium oxide thin films

3. A review of Ga2O3materials, processing, and devices

4. Floating zone growth of β-Ga2O3: a new window material for optoelectronic device applications

5. Plasma enhanced atomic layer deposition of Ga2O3thin films

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