Comparative Study of the Environmental Impact of Depositing Al2O3 by Atomic Layer Deposition and Spatial Atomic Layer Deposition
Author:
Affiliation:
1. Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, Grenoble F-38000, France
2. Univ. Grenoble Alpes, CNRS, Grenoble INP, G-SCOP, Grenoble F-38000, France
Funder
Agence Nationale de la Recherche
HORIZON EUROPE European Innovation Council
Deutsche Forschungsgemeinschaft
Publisher
American Chemical Society (ACS)
Subject
Renewable Energy, Sustainability and the Environment,General Chemical Engineering,Environmental Chemistry,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acssuschemeng.3c04135
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