Quantum Yields of Photoacid Generation in 193-nm Chemically Amplified Resists by Fluorescence Imaging Spectroscopy-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Quantum Yields of Photoacid Generation in 193-nm Chemically Amplified Resists by Fluorescence Imaging Spectroscopy

Published:2004-11-16 Issue:26 Volume:16 Page:5726-5730
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Ray Krishanu,Mason Michael D.,Grober Robert D.,Pohlers Gerd,Staford Carolyne,Cameron James F.

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm049448f

Reference29 articles.

1. Chemical Amplification in High-Resolution Imaging Systems

2. Photoinitiators for free-radical-initiated photoimaging systems

3. Chemical amplification mechanisms for microlithography

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical writing and single molecule reading of photoactivatable and silver nanoparticle-enhanced fluorescence;Nanoscale Advances;2020

2. Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials;ACS Nano;2012-11-02

3. Three-Dimensional Nanostructures Formed by Single Step, Two-Photon Exposures through Elastomeric Penrose Quasicrystal Phase Masks;Nano Letters;2008-07-08

4. Radiation-Induced Reaction of Sulfonamide-Containing Polymers in the Film State for Color Imaging;Macromolecular Chemistry and Physics;2008-03-25

5. Sensitization Reaction of Oxime Type Photoacid Generator;Journal of Photopolymer Science and Technology;2008

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3